Description
Adopts ISO 14644-2:2015 to specify minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
Product Details
- Edition:
- 1st
- Published:
- 12/13/2017
- ISBN(s):
- 9781760359201
- Number of Pages:
- 14
- File Size:
- 1 file , 640 KB
- Product Code(s):
- 10105457, 10105498, 10105468