Description
States that makeup air for semiconductor clean spaces can vary from 5.08 L/s•m2 to 50.81 L/s•m2. Accordingly, the energy requirements to cool, dehumidify, preheat and/or humidify are significant and can represent 30% to 65% of the total thermal energy required to maintain a clean room environment. The greatest opportunity for significant energy savings can be achieved by reducing or displacing mechanical cooling or fuel-generated heating requirements. Presents and discusses various concepts of heat recovery, dual-temperature cooling, direct and indirect evaporative cooling and heat rejection directed towards makeup air systems that can achieve these objectives. In addition, explores equipment-sizing considerations not necessarily applicable to systems that are less energy-intensive or that operate continuously.
KEYWORDS: Clean rooms, make up, air conditioning, energy conservation, heat recovery.
Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990
Product Details
- Published:
- 1990
- Number of Pages:
- 7
- File Size:
- 1 file , 1 MB
- Product Code(s):
- D-18699
